Fluid device

ABSTRACT

In a fluid device composed of vertical and horizontal fluid lines, for a purpose of improving a compact size and of assuring ease of assembly, a plurality of vertical fluid lines are arranged in parallel to each other, and in the fluid device where, between the adjoining vertical fluid lines, a plurality of horizontal fluid lines for connecting them are arranged in parallel, one of the horizontal fluid lines connects pipes by using a flange joint to be fastened with a coupling ring, and the other one connects pipes by using joint pipes.

CROSS-REFERENCE TO RELATED APPLICATION(S)

The present application is a divisional of U.S. patent application Ser.No. 12/957,283 filed Nov. 30, 2010, entitled “Fluid Device,” whichclaims priority to Japanese Patent Application Nos. 2009-272747, filedNov. 30, 2009, and 2009-296396, filed Dec. 25, 2009, the entire contentsof each are incorporated herein by reference for all purposes.

TECHNICAL FIELD

The present invention relates to a fluid device such as a gas panel fora material gas supply line of a semiconductor manufacturing apparatusand the like, the fluid device being composed by connecting a pluralityof fluid apparatuses and pipes in horizontal and vertical directions. Inaddition, the present invention relates to a fluid apparatus fixationdevice for a fluid device used for the semiconductor manufacturingapparatus and the like, wherein the fluid apparatus fixation device isused for fixing a plurality of fluid apparatuses connected by pipes toeach other.

BACKGROUND ART

A so-called flange joint is employed for connecting pipes by couplingflange parts provided at end portions of the pipes, and as shown inPatent Literature 1, a type of flange joint is known that includes acoupling ring externally fitted to a facing flange part for pushing aninclined surface provided at each flange part toward a radial direction,compressing to couple the flange parts with a component force in anaxial direction caused at the occasion, and arranging the pipes inseries. A feature of the flange joint using the coupling ring is to beable to shorten a length in the axial direction as much as possible.

CITATION LIST Patent Literature

-   Patent Literature 1: JP2008-286325A

SUMMARY Technical Problem

Accordingly, the inventors studied a device using this type of flangejoint in a fluid device having fluid lines in horizontal and verticaldirections, the device, for example, being used in a material gas supplyof a semiconductor manufacturing apparatus. That is the device havingthe configuration shown in FIG. 1. Comparing the device to the deviceshown in FIG. 2 using a screw type pipe joint, it can be found that theconfiguration can be very compact in size by using the flange joint.

Especially, as shown in FIG. 1, in the case of a configuration where afluid apparatus is provided at a vertical fluid line L1, since reductionof a vertical dimension is restricted due to a size of the fluidapparatus, it becomes very important to reduce a horizontal dimension;however, the fluid device in FIG. 1 has a smaller horizontal dimensionin comparison with that of the fluid device in FIG. 2, and accordinglyhas a great merit in this point.

Meanwhile, in FIGS. 1 and 2, reference numeral L1 shows a gas supplyline, reference numeral L2 shows a cleaning gas supply line, referencenumeral L3 shows an outlet collective line, reference numeral 11 shows amass flow controller, reference numerals 12 and 13 show a bulb and apressure sensor, reference numerals 2, 2′, and 2″ show a flange joint,reference numeral 20, 20′ and 20″ show a screw type pipe joint, andreference numerals 4, 4′, and 4″ show a pipe.

However, since the flange joint is able to shortly and tightly couplethe pipes, there are problems in that deformation of the pipe is verysmall and that an allowable range of a dimension error is narrow. Thisbecomes pronounced in the case where the fluid lines are connected inhorizontal and vertical directions as shown in FIG. 1.

That is, in the configuration of FIG. 1, it is assumed that there aredimension errors in the mass flow controller and in the pipes extendingfrom the controller and that there is a slight difference of a length inone gas supply line. In that state, when the cleaning gas supply line isconnected to each of the gas supply lines, a vertical position gapoccurs between the bulbs to which the outlet collective line isconnected. However, the position gap cannot be absorbed in deformationof the pipes, and accordingly there may be the situation where theoutlet collective line cannot be formed. In the same manner, this may becaused in a case where the outlet collective line is firstly connected.

Accordingly, in the fluid device in which the fluid lines are arrangedand connected in horizontal and vertical directions to each other, thepresent invention intends to solve the problem of the flange joint thatan allowable range of the dimension error is narrow and can easily causea mismatch in the assembly, by utilizing the above-mentioned feature ofthe flange joint with the coupling ring as much as possible.

Solution to Problem

Specifically, a fluid device according to the present inventionincludes: a plurality of vertical fluid lines, each vertical fluid linehaving one or more fluid apparatuses and pipes that are connected inseries; and a plurality of horizontal fluid lines, each horizontal fluidline having one or more series-connected pipes, wherein the plurality ofthe vertical fluid lines are arranged to be fluidically parallel to eachother, and wherein between any two adjoining vertical fluid lines, theplurality of horizontal fluid lines for connecting them are arranged tobe fluidically parallel, wherein one of the plurality of horizontalfluid lines includes a plurality of series-connected pipes having aflange part at an adjoining end portion; and a coupling ring externallyfitted to the adjoining flange part for pressing an inclined surfaceprovided to the flange part in a radial direction and for compressing toconnect the flange parts by using a component force in an axialdirection generated at the moment, and

wherein another one of the plurality of fluidically parallel horizontalfluid lines is arranged between the pipes of the adjoining verticalfluid lines and includes a pipe connected to the pipes of the verticalfluid lines by joint pipes.

Since the pipe connection due to the joint pipe is fixation(non-disconnectable) realized by welding and the like, there is aninconvenience that the pipe cannot be disconnected after beingconnected; however, a length of the pipe can be long, and accordinglysize errors of the pipe and the fluid apparatus can be allowed by astructural flexure of certain degree, and by adjustment in assembly,reduction of the size can be assured.

Consequently, according to the present invention, since the joint pipeand the flange joint are mixed adequately, the problem depending onrigidity of the flange joint can be solved by flexibility of the jointpipe, with maintenance of ease of the assembly and detaching due to theflange joint, and the configuration can be compact in size at least inthe horizontal direction.

To ease a fixing operation due to the welding and the like using thejoint pipe, it is preferable that another one of the horizontal fluidlines is configured to be positioned on the endmost side.

On the other hand, there is also a problem described below. A fluiddevice used in a semiconductor manufacturing apparatus is configured byarranging in parallel a plurality of fluid apparatus groups formed of aplurality of series-connected fluid apparatuses and the like; andconnecting adjoining fluid apparatus groups by using connection meansand the like. On this occasion, there is a method for fixing therespective fluid apparatuses to a substrate and the like via a lowerstep member.

As shown in Patent literature 2, a device having a configuration wherethe fluid apparatus groups are formed on a sub-substrate by: attaching aplurality of the lower step members in series on a long and narrowsub-substrate with screws; and attaching a plurality of fluidapparatuses in series on these lower step members by screws, and theplurality of sub-substrates each on which the fluid apparatus group isformed are attached on one main substrate is known.

-   Patent literature 2: JP2001-245900A

However, in the above-mentioned configuration, the respective fluidapparatuses and the like are required to be attached with screws one byone in order to fix the respective fluid apparatuses, and accordinglythe numbers of parts and process steps are large and cost much time.Meanwhile, in a case of detaching the respective fluid apparatuses, itis also required to remove the screws of the respective fluidapparatuses and the like one by one, and accordingly cost much time aswell. Moreover, since the fixation and detaching of the respective fluidapparatuses are complicated, addition and change of the fluid apparatusgroups also will be complicated.

In addition, it is required not only to fix the respective fluidapparatuses on the substrate and the like but also further to connectthe pipe between the fluid apparatuses. However, the fluid apparatusfixed via the lower step member cannot be moved, and adjustment of theposition of the fluid apparatus will be hard due to the pipe connectionof the fluid apparatuses.

Consequently, in order to solve the above-mentioned problem, the presentinvention mainly intends to provide a fluid apparatus fixation deviceable to easily attach and detach the fluid apparatus, to easily changeand add the fluid apparatus group, and to adjust a position of the fluidapparatus due to the pipe connection.

That is, the fluid apparatus fixation device according to the presentinvention is a fluid apparatus fixation device for fixing a plurality offluid apparatuses connected by pipes on a base, including: a pedestalmember composed of a neck member and a pedestal main body provided belowthe neck member and attached downward on a bottom surface of the fluidapparatus; a rail member arranged on the base in which a penetratinggroove penetrating in a vertical direction is formed; and a biasingmechanism for biasing the rail member or the pedestal member in thevertical direction, wherein in a state where the neck member is insertedin the penetrating groove and where the pedestal main body is insertedbetween the rail member and the base, while the rail member and thepedestal main body are pressed to fix the pedestal member when thebiasing mechanism is operated, the pedestal member can move along thepenetrating groove when the operation of the biasing mechanism isreleased. Meanwhile, a direction vertical to the base is referred to asthe vertical direction for convenience, a direction from the fluidapparatus to the base is a downward direction, and the verticaldirection may be converted into a horizontal direction, may be convertedinto an oblique direction, and may be reversed, depending on a usestate.

In this configuration, since the pedestal member can move along thepenetrating groove when the operation of the biasing mechanism isreleased, each of the fluid apparatuses and the whole of the pluralityof fluid apparatuses connected with pipes are both able to be movedalong the penetrating groove, and the position of the fluid apparatuscan be adjusted due to the pipe connection.

In addition, when the biasing mechanism is operated, the pedestal membercan be fixed, and accordingly the fluid apparatus can be easily attachedwithout attaching the respective fluid apparatuses with screws one byone. On the other hand, when the operation of the biasing mechanism isreleased, the pedestal member can be moved, and accordingly the fluidapparatus can be moved and easily detached without removing the screwsof the respective fluid apparatuses and the like one by one.Consequently, the fluid apparatus can be easily changed and added.

The rail member may be provided to be movable upward and downward, andthe pedestal main body may be sandwiched and pressed between the railmember and the base when the biasing mechanism biases the rail membertoward the base.

An insert hole with a size where the pedestal main body can be insertedupward and downward may be provided on a plurality of positions of therail member, and the insert hole may be continued to the penetratinggroove. In this configuration, since the pedestal main body can beinserted in the insert hole, only the fluid apparatus to be changed canbe attached and detached under a condition where the fluid apparatus notto be changed is kept in the attached state.

To ease the moving more, it is desirable that the pedestal main bodyincludes a rolling body for rolling on the base.

To resist the moving at fixation, it is desirable that a surface of thebase is configured to be elastically-deformable.

Advantageous Effects of Invention

According to the present invention, since a pipe connection realized bya joint pipe allows a dimension error of a pipe and the like, theproblem depending on rigidity of the flange joint can be solved byflexibility of the joint pipe, thereby maintaining ease of the assemblyand detaching due to the flange joint, and the configuration can becompact in size at least in a horizontal direction.

In addition, according to the present invention, a fluid apparatus canbe easily attached and detached, a group of the fluid apparatus can beeasily changed and added, and additionally in both of the respectivefluid apparatuses and a whole of the plurality of fluid apparatusesconnected by the pipes, a position of the fluid apparatus can beadjusted due to the pipe connection.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is schematic configuration view of a conventional fluid devicecomposed by using a flange joint;

FIG. 2 is schematic configuration view of a conventional fluid devicecomposed by using a screw type pipe joint;

FIG. 3 is a configuration view of a fluid device in a first embodimentof the present invention;

FIG. 4 is a configuration view viewing a flange joint from a planarsurface direction in the embodiment;

FIG. 5 is an exploded perspective view showing a positioning ring andthe like in the embodiment;

FIG. 6 is a configuration view viewing a coupling ring from an axialdirection in the embodiment;

FIG. 7 is a partial cross-section view showing an opening state of thecoupling ring in the embodiment;

FIG. 8 is a vertical cross-section view of the flange joint in theembodiment;

FIG. 9 is a configuration view of a fluid device in another embodimentof the present invention;

FIG. 10 is a side view showing a fluid apparatus fixation device in asecond embodiment of the present invention;

FIG. 11 is a diagram showing a procedure for fixing the fluid apparatusby using the fluid apparatus fixation device in the embodiment;

FIG. 12 is a diagram showing a procedure for changing and adding thefluid apparatus by using the fluid apparatus fixation device in theembodiment;

FIG. 13 is a diagram showing a procedure for fixing the fluid apparatusby using the fluid apparatus fixation device in another embodiment;

FIG. 14 is a diagram showing a procedure for fixing the fluid apparatusby using the fluid apparatus fixation device in another embodiment;

FIG. 15 is a diagram showing a fluid apparatus fixation device infurther another embodiment;

FIG. 16 is a diagram showing a fluid apparatus fixation device infurther another embodiment;

FIG. 17 is a configuration view viewing a pipe joint used in theembodiment from a planar surface direction;

FIG. 18 is an exploded perspective view showing a positioning ring andthe like in the embodiment;

FIG. 19 is a configuration view viewing a coupling ring from an axialdirection in the embodiment; and

FIG. 20 is a vertical cross-section view of the pipe joint in theembodiment.

DESCRIPTION OF EMBODIMENTS

Referring to drawings, a first embodiment of the present invention willbe explained below.

A fluid device 100 according to the present embodiment, as shown in FIG.3, constitutes a gas-panel type fluid supply device that is a part of asemiconductor manufacturing apparatus.

The gas-panel type fluid supply device (hereinafter simply referred toas a gas panel sometimes) is configured by arranging a plurality offluid apparatuses in a plane and connecting there-between by pipes. Thegas panel here uses a flange joint described below in at least a part ofthe pipe connection.

Meanwhile, returning to the first embodiment, as shown in FIG. 3, thefluid device 100 according to the present embodiment includes:substantially parallel-provided three gas supply lines L1 that arevertical fluid lines; two horizontal fluid lines provided between thesegas supply lines L1, herein a cleaning gas supply line L2 for supplyinga cleaning gas to the respective gas supply line L1 and an outletcollective line L3 for unifying outlets of the respective gas supplylines L1.

Next, the respective lines L1 to L3 will be explained.

The gas supply line L1 includes: a plurality of fluid apparatuses 11 to13; pipes 4 extending integrally from the respective fluid apparatuses11 to 13; flange joints 2 for connecting the respective fluidapparatuses 11 to 13 by connecting the pipes 4.

As the fluid apparatus, a mass flow controller 11, an opening andclosing bulb 12, and a pressure sensor 13 are, for example, shown;however, other fluid control apparatuses, fluid measurement apparatuses,and the like may be employed.

Especially as shown in FIG. 4, the pipes 4 are preliminarily connectedto inlet ports and outlet ports of the respective fluid apparatuses 11to 13 at the base end, and a flange part 21 described below is providedat the tip portion in a state before the assembly. In addition, pipeswith the same diameter are used for all the respective pipes 4 here.

As shown in FIGS. 4 to 8, the flange joint 2 includes: a flange part 21formed by the welding and the like integrally on a periphery of the tipportion of the pipe 4; a gasket 22 intervening between the flange parts21 that are faced in order to connect the pipes 4 to each other; apositioning ring 23 for matching the axes of the flange parts 21 to eachother; and a coupling ring 24 that is a coupling member for compressingto couple these flange parts 21.

As shown in FIGS. 4 and 8, the flange part 21 is formed in a circularplate shape, and a convex streak 21 a formed in a closed circular shapeis provided at the end surface (hereinafter referred to as a loweropposed surface). In addition, an inclined surface 21 b inclining in adirection where the diameter is increased toward the end is formed atthe reverse surface, and steps are formed in an end portion 21 c in theperipheral surface, and thus the external diameter of the end portion 21c is configured to be smaller than other portions.

As shown in FIGS. 4 and 8, the gasket 22 is formed in a thinconstant-thickness circular plate shape whose internal diameter is thesame as an internal diameter of the pipe 4 and whose external diameteris the same as an external diameter of the flange part end portion 21 c.

As shown in FIG. 5, the positioning ring 23 is formed in a cylindricalshape, and is configured by using an elastically-deformable metal. And,an internal diameter of the positioning ring 23 is conformed to theexternal diameter of the end portion 21 c so as to be externally fittedto the flange part end portion 21 c free from an extra clearance.

As shown in FIG. 4 and FIGS. 6 to 8, the coupling ring 24 includes: astring of ring parts 241, each rotatably connected to the adjacent ringpart; and a fastener 242 for connecting the ring parts 241 at the bothends to be in a circular shape. A bottom fitting groove 24 a extendingto a circumferential direction is provided at inner circumferentialsurfaces of the respective ring parts 241 (three parts here). And, aninclined surface 24 a 1 corresponding to the inclined surface 21 bformed on the reverse surface of the flange part 21 is formed on a sidesurface of the fitting groove 24 a.

In connecting the pipes 4 to each other by using the flange joint 2, oneend portion of the positioning ring 23 is externally fitted to theflange part end portion 21 c provided at one of pipes 4 to be connectedat first. Next, the gasket 22 and the flange part end portion 21 cprovided at the other one of the pipes 4 are fitted in this order to theother end portion of the positioning ring 23 in an axial direction. Asthe result, the respective flange parts 21, the gasket 22, and therespective pipes 4 are retained with their central axis conformed.

After that, a part of the opposed and closed flange parts 21 are wrappedby the coupling ring 24 set to be in an opening state where the ringparts 241 on both ends are not connected, and the fitting groove 24 a isfitted to the peripheral rim part of the flange part 21. And, the ringparts 241 on both ends of the coupling ring 24 are coupled and fastenedby the fastener 242. In this manner, an internal diameter of thecoupling ring 24 is reduced, and accordingly the side surface inclinedsurface 24 a 1 of the fitting groove 24 a presses the reverse surfaceinclined surfaces 21 b of the respective flange parts 21 in a diameterdirection. On this occasion, a component force to move the respectiveflange parts 21 in a direction of each approaching the axial directionis generated by the inclined surface 21 b, the flange parts 21 arecompressed to each other while the circular convex streak 21 a is thrustinto the gasket 22 by the component force, and thus the pipes 4 areconnected to each other in an air-tight state.

As shown in FIG. 3, the cleaning gas supply line L2 connects the bulbs12 provided on inlet side of the mass flow controller 11 here among thefluid apparatuses 11 to 13 in the respective gas supply line L1, andincludes: a pipe 4′ extending integrally from the respective bulbs 12 ina horizontal direction; and a flange joint 2′ for connecting the bulbs12 to each other by connecting the pipes 4′ to each other. Thestructures of the pipe 4′ and of the flange joint 2′ is the same asthose of the gas supply line L1, and accordingly the explanations willbe omitted here.

As shown in FIG. 3, an outlet collective line L3 connects the pipes 4provided to a position closest to the outlets of the respective gassupply lines L1, and includes: a pipe 4″ provided between the respectivepipes 4; and a welded type pipe joint 6 for connecting the pipe 4 andthe pipe 4″. The welded type pipe joint 6 fits the pipes 4 and 4″ tojoint pipes 61 and 62 of an elbow type, a T-shape type, and the like,and welds them to connect the pipes to each other in an air-tight state.Here, the elbow type joint pipe 61 is used in the gas supply line L1 onone end, and the T-shape type joint pipe 62 is used in the other gassupply lines L1.

As described above, in the above-described configuration, the jointpipes 61 and 62 absorb a size error, and accordingly even when there isthe size error, the fluid device 100 having the plurality of fluid linesL1 to L3 in the respective horizontal and vertical direction can beconfigured to be more compact in size and to be easily attached anddetached further more by using the flange joints 2 and 2′, andespecially the size in the horizontal direction can be reduced. Inaddition, the flange joints 2 and 2′ can be easily attached and detachedfrom the radial direction even in a narrow working space, and the lengthin the axial direction can be reduced as much as possible.

Meanwhile, the present invention is not limited to the embodiment. Forexample, as shown in FIG. 9, the vertical lines L1 may be two, and whenthe fluid device 100 shown in FIG. 9 is considered as one unit, aconfiguration where a plurality of the fluid devices 100 are arrangedand connected in the horizontal and vertical directions may be employed.

In addition, in the plurality of substantially parallel-arrangedhorizontal fluid lines for connecting two vertical lines, it is onlyrequired that a configuration using the joint pipe and a configurationusing the flange joint are combined. That is, for example, in the casewhere there are more than three vertical fluid lines as shown in FIG. 3,the two horizontal fluid lines L2 (or L3) connected in series are thesame type in the drawing; however, one of the two horizontal fluid linesconnected in series may use the joint pipe and the other may use theflange joint.

Moreover, the flange joint is not limited to a configuration using thewedge action caused by the inclined surface as shown in the embodiment,and may employ a configuration using other methods such as the screwing.

The fluid may be not only gas but also liquid, and the numbers of thevertical fluid lines and of the horizontal fluid lines are not limited.In addition, the horizontal fluid line may be applied to a configurationhaving a fluid apparatus other than the pipe and joint. Additionally,the present invention can be variously modified within the scope of theinvention.

Referring to the drawings, a second embodiment of the present inventionwill be explained below.

In order to supply a material gas and the like to a semiconductormanufacturing apparatus for example, a fluid apparatus fixation deviceX100 according to the present embodiment is used for a so-called gaspanel device formed by connecting a plurality of fluid apparatuses X5 ina plane, and as shown in FIG. 10( a), includes: a pedestal member X1attached to bottom surfaces of the respective fluid apparatuses X5; arail member X2 for sandwiching the pedestal member X1 with a planar baseX22; and a biasing mechanism X3 for biasing the rail member X2 downwardto give a force to press the pedestal member X1 toward the base X22.Meanwhile, the fluid apparatus X5 is, for example, a pressure sensor, amass flow controller, a bulb, and the like here.

Explaining the respective parts, as shown in FIG. 10( a) and so on, thepedestal member X1 includes: a bracket member X10 for attachment to abottom surface of the fluid apparatus X5; a neck member X11 droopingfrom a lower surface of the bracket member X10; a body X13 providedsequentially on the lower side of the neck member X11; and a caster X14that is a rolling body attached to a lower surface of the body X13 in afreely horizontally-rotatable manner. Meanwhile, the body X13 and thecaster X14 compose a pedestal main body X12.

The neck member X11 is in a columnar shape, and the body X13 is in acylindrical shape having a diameter larger than that. That is, whenseeing from above, the body X13 is so configured that the outer profileprojects toward an outside than that of the neck member X11, and thatthe projecting upper surface portion is pushed by a lower surface X2 aof the rail member X2 as a pressed surface X13 a described below.

As shown in FIGS. 10 and 11( a), the rail member X2 is aconstant-thickness circular plate shape arranged on the base X22 to bemovable upward and downward, and in the present embodiment, a pluralityof constant-width linear penetrating grooves X20 (three grooves here)extending along a longitudinal direction are formed. In the rail memberX2, circular insert holes X21 are further provided to the penetratinggroove X20 sequentially in plural portions (15 portions in total, 5portions in each penetrating groove X20). While the width of thepenetrating groove X20 is set to be smaller than a diameter of the bodyX13 and to be larger than the thickness of the neck member X11, adiameter of the insert hole X21 has a size allowing the body X13 and thecaster X14 to be inserted upward and downward.

As shown in FIG. 10( a), 10(b), and the like, the biasing mechanism X3,for example, is configured by screwing a bolt X30 penetrating through anend portion of the rail member X2 to a screw hole (not shown in thedrawing) provided to the base X22, and biases the rail member X2downward by fastening the bolt X30 as described above. Moreover, thespring X23 is externally fitted to the bolt X30 so as to wind the bolt.In addition, the biasing mechanism X3 is not limited to the fasteningmember such as the bolt X30 and the screw hole, and the rail member X2may be biased downward by using an elastic body such as a spring.

Meanwhile, in the embodiment, the surface X22 a of the base X22 isformed on an elastic plate.

Next, using the fluid apparatus fixture device X100 according to thepresent embodiment, a procedure to fix the fluid apparatus X5 will beexplained. At first, a state where an operation of the biasing mechanismX3 is released, that is, a state where the bolt X30 is loosened and therail member X2 is lifted upward by a force of the spring X23 is prepared(FIG. 11( a)).

Then, the pedestal member X1 attached to a bottom portion of the fluidapparatus X5 is inserted in the insert hole X21 corresponding to thefluid apparatus X5 from above. In the state where the caster X14 iscontacted to the base X22, the pedestal main body X12 is placed betweenthe rail member X2 and the base X22, and the neck member X11 is insertedinto the insert hole X21. And, as shown in FIG. 11( b), the fluidapparatuses X5 are connected with the pipes by using the pipe joints X4.

An example of the pipe and pipe joint X4 will be explained. Especiallyas shown in FIG. 17, the pipe is preliminarily connected to an inletport and an outlet port of each fluid apparatus X5 at the base end, andthe flange part X61 described below is provided to the tip portion in astate before the assembly. In addition, pipes with the same diameter areused for all the pipes here.

As shown in FIGS. 17 to 20, the pipe joint X4 includes: a flange partX61 formed by the welding and the like integrally on a periphery of thetip portion of the pipe X4; a gasket X62 intervening between the flangeparts X61 that are faced in order to connect the pipes to each other; apositioning ring X63 for matching the axes of the flange parts X61 toeach other; and a coupling ring X24 that is a coupling member forcompressing to couple these flange parts X61.

As shown in FIG. 18 and the like, the flange part X61 is formed in acircular plate shape, and a convex streak X61 a formed in a closedcircular shape is provided at the end surface (hereinafter referred toas a lower opposed surface). In addition, an inclined surface X61 binclining in a direction where the diameter is increased toward the endis formed at the reverse surface, and steps are formed in the endportion X61 c in the peripheral surface, and thus the external diameterof the end portion X61 c is configured to be smaller than otherportions.

As shown in FIG. 18 and the like, the gasket X62 is formed in a thinconstant-thickness circular plate shape whose internal diameter is thesame as the internal diameter of the pipe and whose external diameter isthe same as an external diameter of the flange part end portion X61 c.

As shown in FIG. 18 and the like, the positioning ring X63 is formed ina cylindrical shape, and is configured by using anelastically-deformable metal. And, the internal diameter of thepositioning ring X63 is conformed to the external diameter of the endportion X61 c so as to be externally fitted to the flange part endportion X61 c free from an extra clearance.

As shown in FIG. 19 and so on, the coupling ring X24 includes: a stringof ring parts X241 rotatably connected to the adjacent ring parts eachother; and a fastener X242 for connecting the ring parts X241 at theboth ends to be in a circular shape. A bottom fitting groove X24 aextending to a circumferential direction is provided to innercircumferential surfaces of the respective ring parts X241 (three partshere). And, an inclined surface X24 a 1 corresponding to the inclinedsurface X61 b formed on the reverse surface of the flange part X61 isformed on a side surface of the fitting groove X24 a.

In connecting the pipes to each other by using the pipe joint X4, oneend portion of the positioning ring X63 is externally fitted to theflange part end portion X61 c provided to one of the pipes to beconnected at first. Next, the gasket X62 and the flange part end portionX61 c provided to the other one of the pipes are fitted in this order tothe other end portion of the positioning ring X63 in the axialdirection. As the result, the respective flange parts X61, the gasketX62, and the respective pipes are retained with their central axisconformed.

After that, a part of the opposed and close flange parts X61 are wrappedby the coupling ring X24 set to be in an opening state where the ringparts X241 on both ends are not connected, and the fitting groove X24 ais fitted to the peripheral rim part of the flange part X61. And, thering parts X241 on both ends of the coupling ring X24 are coupled andfastened by the fastener X242. In this manner, the internal diameter ofthe coupling ring X24 is reduced, and accordingly the side surfaceinclined surface X24 a 1 of the fitting groove X24 a presses the reversesurface inclined surfaces X61 b of the respective flange parts X61 inthe diameter direction. On this occasion, a component force to move therespective flange parts X61 in a direction approaching the axialdirection is generated by the inclined surface X61 b, the flange partsX61 are compressed to each other while the circular convex streak X61 ais thrust into the gasket X62 by the component force, and thus the pipesare connected to each other in an air-tight state.

Meanwhile, in the present embodiment, since an interval between theinsert holes X21 is configured in accordance with an interval betweenthe fluid apparatuses X5, the pedestal members X1 of the fluidapparatuses X5 connected to each other may be inserted into the inserthole X21 at one time after the line has been preliminarily formed byconnecting the fluid apparatuses X5 with the pipes.

Accordingly, since being directly under the insert holes X21 in thisstate, the pedestal main body X12 will escape upward if left in thisstate. Then, as shown in FIGS. 11( c) and 10(a), the fluid apparatus X5is moved along the penetrating groove X20, rolling the caster X14 sothat the pedestal main body X12 can be positioned below the penetratinggroove X20. On this occasion, all the pedestal main bodies X12 are notnecessarily positioned below the penetrating grooves 20, and it isrequired that at least one of the pedestal members X1 is positionedbelow the penetrating groove X20.

The bolt X30 is fastened in this state, thereby operating the biasingmechanism X3. Then the rail member X2 withstands the force of the springX23 to move downward, and accordingly the lower surface X2 a adjacent tothe penetrating groove X20 presses downward on the pressed surface X13 athat is the upper surface of the pedestal main body X12. In this manner,the pedestal main body X12 is sandwiched and fixed between the railmember X2 and the base X22 (FIG. 10( b)).

On this occasion, since the surface X22 a of the base X22 is formed ofthe elastic plate, the lower portion of the pedestal main body X12thrusts into the elastic plate, and thus the pedestal member X1 is fixedso as not to move.

When the fluid apparatus X5 is detached, the process is carried out in areverse procedure.

According to the fluid apparatus fixation device X100 of theabove-mentioned configuration, the fluid apparatus X5 can be easilyattached and detached, a group of the fluid apparatuses X5 can be easilychanged and added, and a position of the fluid apparatus X5 can beadjusted for the pipe connection in both of the respective fluidapparatuses X5 and all of the plurality of fluid apparatuses X5.

Additionally, since the interval of the insert holes X21 is configuredin accordance with the interval between the fluid apparatuses X5, thefluid apparatus X5 can be attached by inserting the pedestal members X1of the plurality of fluid apparatuses X5 connected by the pipes into theinsert holes X21 at one time.

In addition, the change of one fluid apparatus X5 also can be easilycarried out. The rail member X2 is lifted after the bolt 30 has beenloosened, a state where the fluid apparatus X5 can move in the directionof extension of the penetrating groove X20 is prepared, and then thepipe joint X4 of the fluid apparatus X5 to be changed is detached. Afterthat, as shown in FIG. 12( a), both the adjoining fluid apparatuses X5are slightly moved toward the outside, and the fluid apparatus X5 to bechanged is withdrawn from the insert hole X21.

Then, another fluid apparatus X5 is inserted from the insert hole X21,and is connected to the pipes by pulling the adjoining fluid apparatusesX5. After that, as shown in FIG. 12 (b), the fluid apparatus X5 is movedalong the penetrating groove X20 so that the pedestal main body X12 canbe positioned below the penetrating groove X20, the bolt X30 isfastened, and accordingly the pedestal main body X12 is fixed.

Moreover, as shown in FIG. 12 (c), the fluid apparatus X5 also can beeasily added in the same manner.

Meanwhile, the present invention is not limited to the embodiment. Forexample, as shown in FIG. 13( a), the number of the insert holes X21 isnot necessarily required to be the same as that of the fluid apparatusesX5, and additionally is not required to be associated with a connectioninterval of the fluid apparatuses X5. A method of the attaching anddetaching of a case where the number of the insert holes X21 is smallerthan that of the fluid apparatuses X5 will be explained below. That is,the bolt X30 is firstly loosened, the pedestal member X1 attached to thebottom portion of the fluid apparatus X5 is, as shown in FIG. 13( b),inserted to the insert hole X21 from above in the state where the railmember X2 is lifted upward, and is moved along the penetrating grooveX20. Next, as shown in FIG. 14( a), other fluid apparatuses X5 areinserted to the insert holes X21 in turn, and are connected with thepipes by pulling the adjoining fluid apparatuses X5, respectively. Afterthat, as shown in FIG. 14( b), when the fluid apparatus X5 is moved sothat the pedestal main body X12 can be positioned below the penetratinggroove X20 and the bolt X30 is fastened, the pedestal member X1 isfixed.

In addition, the insert hole X21 does not necessarily need to beprovided. In this case, as shown by one example in FIG. 15, thepenetrating groove X20 needs to be extended to an end surface of therail member X2.

In addition, the penetrating grooves X20 are not required to be aplurality of rectangular parallelepiped shapes that are substantiallyparallel with each other, and the plurality of penetrating grooves X20may be provided to be orthogonal or intersected so as be continued andthe penetrating groove X20 may be provided to be C-shaped, L-shaped, andcross-shaped.

The rail member moves in the vertical direction, but may move in anobliquely downward direction, an obliquely upward direction, and thelike. That is, it is required to move at least in the verticaldirection.

Moreover, the caster is not necessarily required, and the pedestal mainbody may be a rectangular parallelepiped member and the like.

It is not required to attach the pedestal member on the bottom surfacesof all fluid apparatuses, but is required to attach the pedestal memberon at least one of the plurality of fluid apparatuses. In addition, oneor more pedestal members may be provided on the fluid apparatus.

In addition, in a case where the connection intervals between the fluidapparatuses are varied respectively, by employing one connectioninterval as a reference connection interval, one or more pedestalmembers may be provided to the respective fluid apparatuses in eachreference connection interval. Moreover, the insert hole may be providedin an equal interval in each reference connection interval. In theabove-mentioned configuration, the pedestal members of the plurality offluid apparatuses connected to each other can be inserted to the insertholes and be withdrawn at one time although not from the insert holescorresponding to the respective fluid apparatuses.

In the present embodiment, of the respective surface of the fluidapparatus, the pedestal member is attached on the bottom surface that isa surface facing the base, but may be attached via a bracket member andthe like to the respective surfaces such as a side surface, a ceilingsurface, and the like of the fluid apparatus.

A configuration where the rail member does not move in the verticaldirection and where the pedestal main body is sandwiched to be fixedbetween the base and the rail member by extending and shortening may beemployed. In addition, as shown in FIG. 16, a configuration where therail member X2′ does not move in the vertical direction and where whenthe biasing mechanism X3′ having the biasing member X31 and the springX32 biases upward the bracket member X10 of the pedestal member X1, thepedestal main body X12 and the rail member X2′ are pressed to fix thepedestal member X1 may be employed.

Additionally, the present invention may be configured by combining therespective configurations, and can be variously modified within thescope of the invention.

REFERENCE CHARACTERS LIST

-   -   100 Fluid device    -   11, 12, 13 Fluid apparatus    -   4, 4′, 4″ Pipe    -   L1 Vertical fluid line (gas supply line)    -   L2 Horizontal fluid line (cleaning gas supply line)    -   L3 Horizontal fluid line (outlet collective line)    -   2 Flange joint    -   21 Flange part    -   21 b Inclined surface    -   24 Coupling ring    -   61, 62 Joint pipe    -   X100 Fluid apparatus fixation device    -   X1 Pedestal member    -   X10 Bracket member    -   X11 Neck member    -   X12 Pedestal main body    -   X13 Body    -   X13 a Pressed surface    -   X14 Caster    -   X2 Rail member    -   X2 a Lower surface of rail member    -   X20 Penetrating groove    -   X21 Insert hole    -   X22 Base    -   X22 a Surface of base    -   X23 Spring    -   X3 Biasing mechanism    -   X30 Bolt    -   X4 Pipe joint    -   X5 Fluid apparatus

1. A fluid apparatus fixation device for fixing a plurality of fluidapparatuses connected by pipes on a base, comprising: a pedestal membercomposed of a neck member and a pedestal main body provided below theneck member, and attached downward on a bottom surface of a fluidapparatus; a rail member arranged on the base in which a penetratinggroove penetrating in a vertical direction is formed; and a biasingmechanism for biasing the rail member or the pedestal member in thevertical direction, wherein, in a state where the neck member isinserted in the penetrating groove and where the pedestal main body isinserted between the rail member and the base, while the rail member andthe pedestal main body are pressed to fix the pedestal member when thebiasing mechanism is operated, the pedestal member can move along thepenetrating groove when the operation of the biasing mechanism isreleased.
 2. The fluid apparatus fixation device according to claim 1,wherein the rail member is provided to be movable upward and downward,and the pedestal main body is sandwiched and pressed between the railmember and the base when the biasing mechanism biases the rail membertoward the base.
 3. The fluid apparatus fixation device according toclaim 1, wherein an insert hole with a size where the pedestal main bodycan be inserted upward and downward is provided on a plurality ofpositions of the rail member, and the insert hole is continued to thepenetrating groove.
 4. The fluid apparatus fixation device according toclaim 1, wherein the pedestal main body includes a rolling body forrolling on the base.
 5. The fluid apparatus fixation device according toclaim 1, wherein a surface of the base is configured to be elasticallydeformable.
 6. A rail member composed of a neck member and a pedestalmain body provided below the neck member in order to fix a plurality offluid apparatuses connected by pipes on a base, and used together with apedestal member attached downward on a bottom surface of the fluidapparatus, wherein the rail member is arranged movably upward anddownward on the base and forms a penetrating groove penetrating in avertical direction, and in a state where the neck member is inserted tothe penetrating groove and where the pedestal main body is insertedbetween the rail member and the base, while the pedestal main body ispressed to be fixed by applying a bias force in the vertical direction,the pedestal member can move on the base along the penetrating groove byreleasing the bias force.
 7. A pedestal member used with a rail memberarranged movably upward and downward on a base and that forms apenetrating groove penetrating in a vertical direction, the pedestalmember further used with a biasing mechanism for applying a biasingforce in the vertical direction, in order to fix a plurality of fluidapparatuses connected by pipes on the base, wherein the pedestal membercomprises: a neck member; and a pedestal main body provided below theneck member and provided downward on a bottom surface of the fluidapparatus; and wherein in a state where the neck member is inserted tothe penetrating groove and where the pedestal main body is insertedbetween the rail member and the base, while the pedestal main body andthe rail member are pressed to be fixed when the biasing mechanismoperates, the pedestal main body can move on the base when the operationof the biasing mechanism is released.